Makeshift 1190 (Pty) Ltd v Cilliers 2020 5 SA 538 (WCC)
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AP Instruments Pty Ltd
High quality thermal oxides, as used to provide electrical insulation in MOS devices, underpin the Si:P solid state charge qubit readout architectures. Establishing oxide growth conditions and implantation and annealing parameters that result in suitably low trap/defect concentrations is vital to qubit integrity. However, characterising oxides with thicknesses around 5nm can be challenging. In ...
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ژورنال
عنوان ژورنال: De jure
سال: 2021
ISSN: ['1809-8487', '2358-453X']
DOI: https://doi.org/10.17159/2225-7160/2021/v54a6